摘要本文采用磁控溅射技术在氮化硅陶瓷表面沉积不同的金属膜，通过对比实验的方法研究不同的镀膜工艺对氮化硅和镍基合金钎焊的性能的影响。采用(AgCu28)95。5Ti4。5钎料连接氮化硅陶瓷和镍基合金，研究不同的镀膜工艺对接头剪切强度的影响。本文通过对陶瓷表面磁控溅射镀膜的控制，研究表面预金属化对焊接接头界面组织和力学性能的影响。

通过陶瓷表面预处理时分别镀Ti/Cu和Ti/Mo/Cu，研究了不同的表面预处理对接头组织和力学性能的影响。结果表明，二者都能实现Si3N4陶瓷与GH4169镍基合金的有效连接，Si3N4/钎料界面处均形成了一层致密的反应层，该反应层由TiN和Ti5Si3组成。接头的中间部分，前者由银基固溶体、铜基固溶体组成，后者则是由银基固溶体、铜基固溶体、Mo颗粒和Ti-Cu金属间化合物组成。

在对二者多得的试样进行剪切试验时，发现表面预处理时，镀膜Ti/Mo/Cu的试样剪切强度79Mpa高于镀膜Ti/Cu的试样62Mpa，明显高于不金属化直接钎焊的剪切强度52MPa结合组织分析，可以发现Mo能够促进钎料和母材之间的润湿，加强Si3N4陶瓷与GH4169镍基合金间的连接。

毕业论文关键词：间接钎焊；磁控溅射；组织分析；剪切试验
Abstract In this paper, different metal films were deposited on silicon nitride ceramic by magnetron sputtering technology, and the effect of different coating processes on the properties of silicon nitride and nickel based alloy brazing was studied by comparing experiments。 The influence of different coating processes on the shear strength of the joints was studied by using the (AgCu28)95。5Ti4。5 solder to connect the silicon nitride ceramic and Ni base alloy。 In this paper, the influence of surface metallization on the microstructure and mechanical properties of the welded joint is studied by controlling the surface of the ceramic surface by magnetron sputtering。

The effects of different surface pretreatment on the microstructure and mechanical properties of the joints were studied by Ti/Cu and Ti/Mo/Cu, respectively。 The results show that the two can achieve the effective connection between Si3N4 ceramic and GH4169 nickel base alloy, and the Si3N4/ solder interface formed a compact reaction layer, which is composed of TiN and Ti5Si3。 The middle part of the joint, the former by the silver based solid solution, copper based solid solution composition, while the latter is by the silver based solid solution, copper based solid solution, Mo particles and Ti-Cu intermetallic compounds。

Shear experiments were performed in samples of two purposes。 It is found that the surface pre treatment, coating Ti/Mo/Cu sample shear strength 79Mpa than coated Ti/Cu specimens 62Mpa, was significantly higher than that of non metallized 52Mpa shear strength of brazed with the analysis on the structure, can be found that the addition of Mo can promote wetting between brazing filler metal and base metal, strengthen the connection between the Si3N4 ceramic and GH4169 nickel based alloy。

Keywords: Indirect brazing; magnetron sputtering; microstructure analysis; shear test

目录

第一章 绪论 1

1。1课题背景及研究的目的和意义 1

1。2研究现状及分析 2

1。2。1钎焊 2

1。2。2固相扩散焊 4

1。2。3过渡液相扩散焊 5

1。2。4自蔓延高温合成连接 6

1。2。5国内外连接方法的综述简析 6

1。3钎料的研究现状 6

1。4陶瓷/金属的润湿现象