摘要在科学技术日新月异的今天，材料是人类社会发展的物质基础和先导，而新材料的发展水平则是人类社会进步的重要标志。理论和实验表明，稀土元素的掺杂可从本质上影响Co基非晶薄膜的复数磁导率特性，稀土元素的适量加入可提高共振频率，提高其高频软磁性。67481

本课题利用磁控溅射技术在不同Zr含量的CoZr基上溅射Nd元素，制备了一系列CoZrxNdy（x=1,2,3,4，y=1,2）薄膜，并利用振动样品磁强计（VSM）、原子力学显微镜（AFM）等对各个样品的矫顽力、磁各向异性场、饱和磁化强度等随Nd含量的变化关系进行了研究。

    结论表明：样品的面内各向异性场Hk和自然共振频率fr随Nd含量的增加而增加，饱和磁化强度Ms随Nd含量的增加而降低，有效阻尼系数alpha随Nd含量的增加而增加。通过控制Nd掺杂量可以调控薄膜的磁谱特性和磁损耗，因此Nd掺杂对磁性材料的发展具有重要的意义。

毕业论文关键词  Nd掺杂；软磁性能；饱和磁化强度；矫顽力

毕业设计说明书（论文）外文摘要

Title        Effects of Nd-doping on magnetic properties of Co-Zr soft magnetic thin films       

Abstract

In today's science and technology with change rapidly, materials is the material basis and guide of the development of human society, while the level of development of new materials is an important indicator of progress of human society. Theoretical and experimental results show that doping of rare earth elements affect the complex permeability characteristics of Co-based amorphous thin film in essence, adding an appropriate amount of rare earth elements can improve the resonance frequency, increase its frequency soft magnetic properties.

In this subject,a series of thins films of CoZrxNdy (x = 1,2,3,4, y = 1,2) were prepared by RF magnetron sputtering on CoZr-based with different content of Zr, and the changes in relationships with different content of Nd on coercivity,magnetic anisotropy field of simples were systematically studied by vibrating sample magnetometer(VSM),Atomic Force Microscope(AFM) and so on.

Conclusion shows: With increasing of Nd content, the in-plane magnetic anisotropy Hk and the natural resonant frequency fr increase, the saturation magnetization MS decreases and the effective damping alpha increases. The magnetic properties and magnetic loss can be regulated by controlling the amount of Nd-doped film.  Therefore, it has an important significance on the development of magnetic material with Nd-doped. 

Keywords  Nd - doped; soft magnetic properties; saturation magnetization; coercivity

目   次

1  绪论 1

1.1  软磁材料研究进展 1

1.2  磁性材料性质 1

1.3  磁性薄膜高频磁导率理论 2

1.4  CoZr软磁金属薄膜制备及其磁性质 3

1.5  本课题研究背景意义 4

2  实验部分 6

2.1  样品制备 6

2.2  样品测试 9

3  实验数据分析 11

3.1  易轴磁滞回线 11

3.2  难轴磁滞回线 12

3.3  磁导率虚部和实部图谱 14

4  实验结果讨论 17

4.1  Nd掺杂对FeCo薄膜磁性的影响