摘要本文采用磁控溅射法制备Al/CoO含能复合薄膜。利用X射线衍射（XRD）、扫描电子显微镜（SEM）、差示扫描量热（DSC）对Al/CoO含能复合薄膜进行了表征。使用高速摄影仪和双谱线测温法对Al/CoO复合薄膜的电爆特性进行了初步研究和观察。64748

    X射线衍射（XRD）对Al/CoO的组分分析得出CoO组分没有发生偏移，但是没有检测到Al峰或者Al2O3。扫描电子显微镜（SEM）对多层薄膜表面及断面形貌的观察表明Al/CoO含能薄膜表面光滑，但是光滑程度不如Al/CuO复合薄膜。差式扫描量热法（DSC）表明，薄膜在600℃和700℃有两个放热峰，放热总面积为567.5g/J。

    对复合薄膜点火桥的电爆实验表明，通电电压对薄膜的电爆性能有很大的影响。当储能电容为47μf,通电电压为45V时的火焰最高，质量最好，持续时间最长，同时45V测得的温度最高，可以达到7000℃。

毕业论文关键词：磁控溅射，Al/CoO复合薄膜，薄膜表征，电爆性能。

毕业设计说明书（论文）外文摘要

Abstract

    Magnetron sputtering were used to fabricate Al/CoO enegetic multilayer films in this paper. Al/CoO enegetic multilayer films were characterized by X-ray diffraction (XRD), scanning electron microscopy (SEM), differential scanning calorimetry (DSC).And also the electrical explosion characteristics of the films were measured by high-speed photography and double-line atomic emission spectroscopy.

X-ray diffraction (XRD) on the Al/CoO multilayer films indicates that the CoO component is not offset and we can’t find peaks of Al or Al2O3 .Scanning electron microscopy (SEM) observation of the surface and section morphology of multilayer  films reveals that the surface of Al/CoO is smooth, but isn’t as good as Al/CuO films.  We can find two exothermic peaks at 600 ℃ and 700 ℃ and a reaction heat of 567.5J/g by differential scanning calorimetry (DSC).   .

    The electrical explosion experiments of Al/CoO enegetic multilayer films shows that excitation voltage has a great influence on it. When the excitation voltage is 45V, we can find the brightest flame, the longest duration and the highest temperature。

Key word:  Magnetron sputtering, Al/CoO enegetic multilayer films,Characterization, Electrical explosion performance

目录

1 绪论 1

1.1含能桥膜国内外研究情况 1

1.2本文主要研究内容 3

2 Al/CoO复合薄膜的制备 4

2.1复合薄膜制备原理 4

2.2实验装置与材料 5

2.3薄膜制备相关数据计算 6

2.4 Al/CoO复合膜制备工艺流程 6

3 Al/CoO复合薄膜的表征 11

3.1 Al/CoO复合膜材料的XRD检测 11

3.2场发射扫描电子显微镜（FESEM） 12

3.3 热分析 13

4 Al/CoO复合薄膜的电爆性能测试 15

4.1复合薄膜点火桥的制备 15

4.2复合桥膜的电爆伏安曲线测试 16

4.3复合桥膜电爆现象 20

4.4 Al/CoO复合桥膜电爆炸温度测定 21

结  论