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摘要偏振式点衍射干涉仪通过偏振点衍射板使参考光束和测试光束以正交偏振态产生干涉，它不但保留了传统点衍射干涉仪共光路结构、无需参考面等优点，满足了高精度测量的要求。同时偏振技术的引入实现了对衍射光和透射光的光强比控制，解决了光强匹配的问题。偏振式点衍射干涉仪是瞬态波前测试系统中至关重要的一部分。
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为制定偏振式点衍射干涉仪测试波前方案，对波前测试技术、衍射干涉仪基本原理以及光偏振技术进行了研究，建立数学模型进行理论分析。为了达到高精度实验测量要求并获取对比度良好的干涉条纹，分析了偏振式点衍射干涉仪的关键技术。27331
为检测方案可行性，搭建偏振点衍射干涉仪实验装置，采集并处理了干涉条纹，分析了实验中的误差来源。
关键词 点衍射干涉仪 光偏振 波前测试 点衍射板 条纹分析
毕业论文设计说明书外文摘要
Title Polarization phase-shifting point-diffraction interferometer
Abstract
The polarization phase-shifting point-diffraction interferometer (PPSPDI) uses polarization technique to interfere the reference beam and test beam begin as orthogonal polarization states. PPSPDI remains main features of traditional point-diffraction interferometer with common optical path structure and without standard lens, which can satisfy requirement of high precision measurement. Introduced the technique of polarization, it can also make the control of light intensity ratio between diffraction light and transmission light, which solve far-field intensity matching problem between test and reference wavefront. The PPSPDI plays a crucial role in the system of dynamic wavefront testing.
In order to design the wavefront testing scheme based on PPSPDI, the basic theory of optic wavefront technique, point-shifting interferometer and optical polarized technology must be studied with the setup analysis of its mathematical model. Then the technique of the key components of the system is studied and analyzed to satisfy the experiment needs of high precision and to acquire interference fringes with perfect contrast.
Finally, the experimental setup of PPSPDI is built to study the feasibility of this scheme. The interferograms are obtained and analyzed, as well as the experimental errors.
Keywords Point Diffraction Interferometer, Optical polarization, Wavefront measurement, Point diffraction plate, Interferogram analysis.
目 次
摘要 3
Abstract 4
目 次 I
1 绪论 1
1.1 研究背景 1
1.2 光学波前检测技术原理及发展现状 1
1.2.1 夏克-哈特曼波前测量法 2
1.2.2 剪切干涉测量 2
1.2.3 点衍射干涉测量 4
1.3 点衍射干涉仪概述及发展现状 4
1.3.1 传统点衍射干涉仪概述 5
1.3.2 光纤点衍射干涉仪 5
1.3.3 光栅点衍射干涉仪 6
1.3.4 偏振式点衍射干涉仪 7
1.4 主要内容 9
2 偏振式点衍射干涉仪测试波前的建模分析 10
2.1 偏振式点衍射板基本原理 10
2.2 点衍射干涉技术的数学模型 10
2.3 偏振移相干涉技术 12
3 偏振式点衍射干涉仪的关键技术分析 15
3.1 偏振点衍射板参数的测试 15
3.1.1 点衍射板的结构与要求 15