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摘要微机械硅陀螺仪是利用哥氏力原理来测量角速度和角度的一种角速率传感器，很多地方也可以称之为硅角速率传感器。 本文主要介绍闭环驱动和电容检测型微机械硅陀螺仪，该陀螺应用体硅加工工艺制成，采用静电驱动方式，相比电磁驱动方式不受外界磁场干扰。它通过电容的变化来敏感各模态振动，由于电容的变化随温度影响小、稳定性好的特点，使得电容检测方式的硅微机械陀螺成为目前国内外许多公司和研究所研究硅微机械陀螺的主要方向。6423
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对于电容式硅微机械陀螺仪，驱动振幅大多在微米数晕级，检测振幅则更小，在这种微小的振幅下，敏感电容的变化在fF～aF量级。为了提高电容式硅微机械陀螺仪的测量精度，减小陀螺零漂，高信噪比的信号处理方法显得格外重要。
本文主要研究硅陀螺检测信号的数字处理方法。具体采用计算机软件matlab编程方法对微机械硅陀螺的闭环驱动信号，检测信号和解调后的信号进行数字滤波。首先是利用matlab软件作出原始信号的波形与频谱，其次根据滤波要求利用软件matlab设计数字滤波器，并进行数字滤波，作出数字滤波器的幅频特性图与滤波后的信号波形和频谱图，再比较滤波前后的波形与频谱，最后确定最终的适用的滤波器。6423
关键词 硅陀螺 数字处理 matlab 数字滤波
毕业设计说明书（论文）外文摘要
Title Simulation of micromachined angular rate sensors based on IntelliSuite software
Abstract
Due to small size, light weight, low cost and integrated with electronic circuits, micromachined gyroscopes have a variety of applications in both military and civil fields. Traditional design method was inefficienct in the design of micromachined gyroscopes, while micromachined gyroscopes are related to the multi-physics coupling analyses, including the fields of mechanics, fluid mechanics, thermodynamics, and so on. MEMS CAD tools enable us to design, simulate and analyze the deeply coupling system before it could be taken for fabrication process, so the development cycle and costs can be reduced. At the same time, the performance of the micro-machined gyroscopes can be pre-evaluated. Fabrication error of micromachined gyroscopes is the main error source, which limits the performance of the micro-machined gyroscopes, so learning the process of MEMS technology and the process errors was of great importance to micro-machined gyroscopes' designers.
IntelliSuite sofeware was used in this thesis to simulation of micromachined gyroscope. First of all,mask was constructed in IntelliSuite's Process-level module. Secondlly,3D model was created by the mask constructed, then the 3D model was imported to FEM module to calculate the gyroscope's mode, and the macromodel was extracted from FEM module. Thirdly,the gyroscope's performance was simulated in IntelliSuite's System-level by using the macromodel extracted. Finally,the MEMS process was introduced in this thesis, and a virtual MEMS process of micromachined gyroscope was completed in IntelliSuite sofeware. The simulation results by IntelliSuite sofeware are validated by theoretical analyses and experiments.
Keywords: Micromachined angular rate sensors, IntelliSuite simulation, macromodel extraction, MEMS virtual process, Damping features
毕业设计说明书（论文）外文摘要
Title Silicon micro-gyroscope detection signal digital Processing research
Abstract
Silicon micromechanical gyroscope is use of elder brother's force principle to measure angular velocity and Angle of a kind of angular rate sensor, a lot of places can also call silicon angular rate sensor.This paper mainly introduces the closed loop drive and capacitance detector micro mechanical silicon gyro, this gyro application body silicon processing technology is made,The electrostatic gyro drive mode, electromagnetic drive mode from compared outside magnetic field interference.It through the capacitance change to sensitive each mode vibration, due to the change of capacitance with temperature effect is small, and stability good characteristic,make
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