拉曼光谱中激光热效应的研究
毕业论文关键词：拉曼光谱；介孔硅；氧化介孔硅；导热系数
Study on laser-induced thermal effects by Raman scattering
Abstract:：The theoretical model described in this article underlines the dependence of the TC of meso-PS layers on porosity，Si nanocrystallite diameters，and oxidation fraction. To obtain meso-PS with a given TC value，formation conditions and post-fabrication treatment of
the layer have to be well controlled. The model is in good agreement with experimental results obtained by means of a recently described technique for TC measurements based on micro-Raman scattering. Being simultaneously associated with size measurements of Si nanocrystallites and the theoretical model，this technique gives a new approach for estimation of local porosity of the porous samples. TC inhomogeneity along the meso-PS layer thickness was studied. From a practical point of view，an optimum between low TC and good mechanical stability of the thick meso-PS layers has to be found to apply them as a new thermal insulating substrate.
Keywords: micro-Raman spectroscopy; meso-PS; porous silicon; thermal conductivity
目录
1 绪论 1
1.1. 项目背景 1
1.2. 研究现状和发展趋势 2
1.3. 研究目的及意义 3
2 建立理论模型 4
2.1. 已制备的介孔硅层的导热系数 4
2.2. 氧化介孔硅层的导热系数 6
3 拉曼光谱 10
3.1.拉曼光谱理论基础 10
3.2.拉曼光谱技术的分类 12
3.3.实验用拉曼光谱仪 13
4 相关实验 15
4.1. 介孔硅的制备 15
4.1.1. 化学腐蚀法 15
4.1.2. 电化学腐蚀法 15
4.1.3. 原电池法 16
4.2. 用拉曼散射测量导热系数 16
4.3. 利用拉曼散射测量硅纳米晶体的平均尺寸 17
4.4. 介孔硅氧化率的估算 18
5 数据分析 19
5.1. 已制备的介孔硅的表面导热系数 19
5.2. 部分氧化介孔硅的表面导热系数 19
5.3. 不同厚度的介孔硅层的导热系数 20
5.4. 微观结构与多孔硅微观力学性能的关系 22
5.4.1. 多孔硅残余应力分析 23
5.4.2. 多孔硅显微硬度和弹性模量分析 23
6 结论分析 24
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