摘要弹性波是应力波的一种，而声表面波是一种弹性波，它在物体的界面或者弹性固体表面传播，在微流体领域、固体驱动领域和液体驱动领域以及最近工业上很火的液体雾化领域、液体混合领域上的使用十分广泛。此前对声表面波雾化机理已有部分研究，但科学的描述微尺度下液体运动状态和雾化现象十分困难。因此本论文将在实验的基础上研究声表面波驱动液体雾化现象，分析声表面波雾化机理。63488

本课题基于声表面波雾化机理，在实验的基础上，重点讨论声表面波雾化器的制备和应用，重点研究内容如下：

1.本文将具体阐述声表面波技术的发展、声表面波雾化技术在国内外的研究现状和发展趋势以及声表面波技术在微驱动、微混合、液体雾化等领域的应用。

2.介绍声表面波的形成原理并在此基础上阐述声表面波的特点，以及阐述声表面波雾化机理和声表面波驱动液体雾化的特点。

3.通过微细加工工艺制备声表面波雾化器，基于微细加工工艺流程，讨论声表面波雾化器的结构和叉指式换能器的制备，通过对叉指结构各种参数的优化，制备合适的声表面波雾化器。

4.基于声表面波雾化器，搭建声表面波雾化测试平台。

5.具体阐述了声表面波液体雾化实验，实现了不同浓度液体，如蒸馏水、浓盐水的雾化。根据不同浓度液体的雾化效果，优化声表面波雾化器。

最后，本文对毕业课题进行的声表面波雾化实验、液体驱动实验进行了总结，在此基础上展望了声表面波技术在液体雾化领域上的未来。

毕业论文关键词：声表面波（SAW）；雾化；微流体

Mechanism and applications of surface acoustic wave atomization

Abstract Surface acoustic wave (SAW) is a kind of elastic wave propagating on the surface of interface or elastic solid, SAW technology is widely used in the fields of microfluidics, solid driving, liquid driving, micro mixing and liquid atomization. The mechanism of surface acoustic wave atomization has been studied in the past, but it is very difficult to describe the state of motion and atomization of liquid scientifically. Therefore, this paper will study the phenomenon of surface acoustic wave driven liquid atomization, and analyze the mechanism of surface acoustic wave atomization.

This paper focuses on the preparation and application of surface acoustic wave atomizer, the most important research contents of this paper are as follows:

1. In this paper, the development of acoustic surface technology, the research status and development trend of surface acoustic wave technology at home and abroad , applications of acoustic surface technology in the fields of micro driving, micro mixing and liquid atomization are introduced.

2. The principle and characteristics of surface acoustic wave  

are introduced. Based on this, the mechanism of surface acoustic wave and the characteristics of surface acoustic wave driven liquid atomization are described.

3. Micro fabrication techniques of surface acoustic wave atomizer are studied, the structure of surface acoustic wave atomizer and the preparation of IDT are discussed, and a suitable surface acoustic wave atomizer is fabricated through the optimization of interdigital structure parameters.

4. Based on surface acoustic wave atomizer, a surface acoustic wave testing platform is built.

5. The surface acoustic wave liquid atomization experiment is described in detail, and atomization of different concentration liquid such as distilled water and concentrated brine is realized. The surface acoustic wave atomizer is optimized according to the atomization effect of liquid with different concentration.

In the end, this paper summarizes the surface acoustic wave atomization experiments and liquid driving experiments, and looks forward to the future of surface acoustic wave technology in the field of liquid atomization.