硅微机械陀螺仪自激驱动闭环电路设计+电路图
毕业论文关键词 硅微机械陀螺仪 驱动模态 自激振荡 AGC 环节 相位控制 幅度控制
Title Title Title Title Design of Closed-Loop Self-Oscillation Circuit forMEMS GyroscopeAbstract Abstract Abstract AbstractMEMS gyroscope is a new type of tiny inertial sensor developed in resentyears . With the superiority of small volume ,light weight ,low powerconsumption ,easy to volume-produce and so on ,it's widely applied inmilitary and civil areas.Based on the analysis of MEMS gyroscope driven modal kinetic equation andelectrostatic driving force ,the closed-loop self-oscillating drivercircuit system is analyzed ;also compared the existing circuits ,eachpart of circuit is designed; and simulation of the overall loop isintroduced ; finally a PCB board is produced and verified experiments areconducted .Details are as follows ：（ 1 ） Refering to MEMS gyroscope simplified model ,d riven modal dynamicsare analysed to reach the conclusion that the driving frequency of themaximum amplitude corresponds to the natural frequency of the drivingmodal .The electrostatic driving force expression is derived according tothe comb capacitor structure .（ 2 ） T he principle of self-oscillation introduced ,and to meet themagnitude and phase requirements of MEMS gyroscope, the AGC loop-basedself-oscillation system is designed.（ 3 ） Various mature circuits are compared through simulation ,and circuitof each model is designed .Attention is paid to mechanical -electricalinterface circuit ,phase shift circuit and the amplitude control circuit.（ 4 ） In reference to design schematics ,the circuit is welded and tested .Firstly , open-loop drive can provide the natural frequency of thedrive modal and text and verify phase angle condition and start-upcondition of self-excited oscillation .Then ,closed-loop drive waveformis monitored to analysis the oscillation frequency and verify the stablingamplitude action.
Keywords MEMS gyroscope , drive modal , self-excited oscillation , AGClink , phase control , amplitude control
目次
1绪论..1
1.1研究背景与意义..1
1.2硅微机械陀螺仪驱动电路.2
1.2.1硅微机械驱动电路简介..2
1.2.2硅微机械陀螺仪驱动电路研究现状3
1.3本文主要内容4
2硅微陀螺仪驱动模态的工作原理.5
2.1驱动模态的动力学方程..5
2.2硅微机械陀螺仪的驱动机理分析.7
2.2.1硅微机械陀螺仪的结构..7
2.2.2静电驱动力的计算.8