ANSYS具有mesa结构的石英晶体微天平能陷效应分析与仿真
毕业论文关键词 QCM；振动耦合；能陷理论；有限元分析; 台面结构
Title Analysis and Emulation of Energy Trapping Effect on QCM with Mesa Structure QCM (Quartz Crystal Microbalance) quartz crystal microbalance is a new sensitive sensor used in measuring the quality. QCM has many advantages, such as high accuracy, small size, good stability and wide operating temperature range. However, due to the small size and high precision of the quartz crystal microbalance, the measurements are affected by the various parameters of the QCM. To solve these problems, energy trapping theory and finite element analysis are adopted to optimize the QCM structure in this paper. QCM with mesa structure is used in this paper to eliminate these influential vibration modes and parasitic modes, which can effectively inhibit the vibration coupling and reduce the vibration energy consumption in non-electrode area. Finite element analysis ANSYS12.0 is used in this paper to give a three- dimensional simulation of mesa structure QCM. Three-dimensional simulation is more intuitive and more visual in resulting the relationship between the variables. The optimization of mesa structure QCM will be concluded after the data analysis of the simulation results.
Keywords QCM; vibrational coupling; energy trapping effect; finite element analysis; mesa structure
目次
第一章绪论1
1.1引言.1
1.2石英晶体微天平.1
1.2.1QCM概述1
1.2.2理论基础2
1.2.3QCM的工作原理及特点.5
1.4QCM的研究价值与应用领域.7
第二章QCM的振动耦合与能陷理论9
2.1QCM的振动耦合.9
2.2抑制耦合的措施.11
2.3能陷理论12
第三章基于有限元分析的QCM仿真.14
3.1引言14
3.2有限元分析（FEA）基本原理.14
3.3电极区的等效处理16
3.4QCM能陷效应仿真17
第四章仿真过程及结果分析.20
4.1具有台面结构的QCM的参数确定20
4.2ANSYS仿真过程.21
4.3数据后处理23
4.3.1截止频率的确定23
4.3.2和半径之间的关系的确定.25
4.4结果分析26
总结.27
致谢.29
参考文献30
第一章 绪论 1.1 引言 随着科技的发展，本文对自然的探索更加深入，本文也把目光集中到更小的东西。作为一种能接收各种信号并将其转化为人类可读取信息的元器件或装置，传感器的作用正日益显现。压电石英晶体谐振器对温度、湿度、压力、加速度、振动、电磁波、射线等都具有很高的灵敏度，使得它成为高精确度的传感器，其中的一项应用就是石英晶体微天平(Quartz Crystal Microbalance，简称QCM) [3]。 石英晶体微天平，是一种非常灵敏的质量检测仪器，源]自=优尔-·论~文"网·www.youerw.com/ 其测量精度可达纳克级，比灵敏度在微克级的电子微天平高 100 倍。被广泛应用于化学、物理、生物、医学和表面科学等领域中，用以进行气体、液体的成分分析以及微质量的测量、薄膜厚度的检测等。石英晶体微天平利用了石英晶体谐振器的压电特性，将石英晶振电极表面质量变化转化为石英晶体振荡电路输出电信号的频率变化，进而通过计算机等其他辅助设备获得高精度的数据。