摘要TiCN薄膜具有高硬度、高韧性、强附着力、摩擦系数小、抗氧化以及导热率低等优良性能。由于多弧离子镀的沉积效率高，所以这种方法现已成为制备TiCN薄膜的一种主流方法。本论文是利用多弧离子镀设备，在已设定沉积参数下的情况下，于未渗氮和渗氮的W6Mo5Cr4V2Co5高速钢基体上分别沉积TiCN薄膜。并通过各种检测手段，如扫描电镜（SEM）、EDS、洛氏硬度计、纳米压痕仪等，对所制备的薄膜进行检测以及对其力学性能进行研究，同时使用电化学工作站测试薄膜的耐腐蚀性能，最后通过摩擦磨损试验机来检验薄膜的摩擦磨损性能。结果表明，基材是否渗氮对TiCN薄膜的表面形貌、薄膜厚度、硬度和弹性模量没有明显影响；渗氮工艺对薄膜的膜基附着力有较大的提升；在电化学方面，渗氮工艺对TiCN薄膜的耐蚀性能稍有提升；对于其摩擦磨损性能，渗氮工艺可以提高TiCN薄膜的耐磨性。86497

毕业论文关键词：TiCN薄膜，多弧离子镀，摩擦磨损，电化学腐蚀

Abstract  TiCN film has excellent properties, such as high hardness, high toughness, strong adhesion, low friction coefficient, oxidation resistance, low thermal conductivity and so on。 Due to the high deposition efficiency of multi arc ion plating, this method has become a main method for the preparation of TiCN films。 In this paper, TiCN films were deposited on the substrate of W6Mo5Cr4V2Co5 high speed steel, which had been under the condition of setting deposition parameters by using multi arc ion plating equipment。 The morphology and mechanical properties of the films were investigated by various detection means , such as scanning electron microscope（SEM）, Rockwell hardness tester, Nano Indenter, detect the as-deposited thin films。 The corrosion resistance was studiedusing the electrochemical workstation。 Finally, the friction and wear properties of thin films were investigated by friction wear testing machine。 Results showed that the nitriding on substrate has no significant effect on the surface morphology, film thickness, hardness and elastic modulus of TiCN coating。 The adhesion between film and substrate is greatly improved by nitriding process。in electrochemistry, nitriding process on TiCN coating corrosion resistance improve slightly; for the friction and wear properties, nitriding process can improve the wear resistance of TiCN films。

Keywords: TiCN film，multi arc ion plating，friction and wear, electrochemical corrosion

目  录

第一章 绪论 1

1。1引言 1

1。2  TiCN镀层 1

1。2。1 TiCN镀层技术发展 1

1。2。2 TiCN镀层的性能 2

1。3 多弧离子镀技术的研究现状 3

1。3。1 多弧离子镀技术的发展 3

1。3。2 多弧离子镀技术的原理 3

1。3。3 多弧离子镀技术的特点 4

1。3。4 多弧离子镀技术的应用 5

1。4 镀层刀具 6

1。5选题的目的和意义与研究内容 7

1。5。1选题的目的和意义 7

1。5。2研究内容 7

第二章 实验方法及原理 8

2。1 TiCN薄膜的制备方法与实验设备 8

2。1。1 TiCN薄膜制备的基本方法