关键词：TiCN薄膜，多弧离子镀，摩擦磨损，电化学腐蚀

Abstract

    TiCN film has excellent properties, such as high hardness, high toughness, strong adhesion, low friction coefficient, oxidation resistance, low thermal conductivity and so on。 Due to the high deposition efficiency of multi arc ion plating, this method has become a main method for the preparation of TiCN films。 In this paper, TiCN films were deposited on the substrate of W6Mo5Cr4V2Co5 high speed steel, which had been under the condition of setting deposition parameters by using multi arc ion plating equipment。 The morphology and mechanical properties of the films were investigated by various detection means , such as scanning electron microscope（SEM）, Rockwell hardness tester, Nano Indenter, detect the as-deposited thin films。 The corrosion resistance was studiedusing the electrochemical workstation。 Finally, the friction and wear properties of thin films were investigated by friction wear testing machine。 Results showed that the nitriding on substrate has no significant effect on the surface morphology, film thickness, hardness and elastic modulus of TiCN coating。 The adhesion between film and substrate is greatly improved by nitriding process。in electrochemistry, nitriding process on TiCN coating corrosion resistance improve slightly; for the friction and wear properties, nitriding process can improve the wear resistance of TiCN films。

Keywords: TiCN film，multi arc ion plating，friction and wear, electrochemical corrosion

目  录

第一章 绪论 1

1。1引言 1

1。2  TiCN镀层 1

1。2。1 TiCN镀层技术发展 1

1。2。2 TiCN镀层的性能 2

1。3 多弧离子镀技术的研究现状 3

1。3。1 多弧离子镀技术的发展 3

1。3。2 多弧离子镀技术的原理 3

1。3。3 多弧离子镀技术的特点 4

1。3。4 多弧离子镀技术的应用 5

1。4 镀层刀具 6

1。5选题的目的和意义与研究内容 7

1。5。1选题的目的和意义 7

1。5。2研究内容 7

第二章 实验方法及原理 8

2。1 TiCN薄膜的制备方法与实验设备 8

2。1。1 TiCN薄膜制备的基本方法 8

2。1。2 TiCN薄膜制备设备 8

2。1。3 TiCN薄膜的沉积参数 10

2。2 薄膜的表征方法和检测设备 10

2。2。1扫描电子显微镜(SEM) 10

2。2。2能量色散谱仪(EDS) 11

2。2。3 摩擦磨损试验机 11

2。2。4 纳米压痕 12

2。2。5 膜厚测定 13

2。2。6 电化学测试 13

第三章 TiCN薄膜的性能研究 15

3。1 TiCN薄膜的表面形貌、厚度及微观结构 15

3。1。1 TiCN薄膜的表面形貌