摘要非接触式真空搬运作为一种新型的搬运技术,具有适用范围广、清洁、性能
稳定等优点,有着广泛的应用前景。因此,研究开发一种用于芯片加工的非接触
式真空搬运系统具有其学术意义与实际的应用需求。本文在参阅了各种资料后,
首先对搬运系统的总体技术方案进行了分析,设计了其气动回路,根据系统要求
选择了合适的气缸。在第二阶段,针对该吸盘的工作特点设计了与之对应的搬运
系统的机械结构并设计了新型的非接触式真空吸盘,阐述了该吸盘的工作原理。
最后,分析了搬运过程的动作步骤,为该搬运系统进行了 PLC 编程工作,使其能
够实现搬运功能。5647
关键词 芯片加工 真空 系统设计 PLC 编程
毕业设计说明书(论文)外文摘要
Title Research of Non-contact Vacuum Handling Technology for Chip Processing
Abstract
Non-contact Vacuum Handling is a new kind of handling technology, which
can adapt to variety kinds of work pieces and has the advantages of no
pollution, stable performance. Therefore, it has wide application
prospects in the field of chip processing. Under this circumstance,
research and development for non-contact chip processing vacuum handling
system has its academic significance and practical application needs. In
this thesis, after reviewed a variety of information, the overall technical
solution of the handling system is analyzed and pneumatic circuit of the
system designed and then proper air cylinders are sorted out by calculating
according to the system requirements. In the next stage, a new kind of
non-contact vacuum cup has been devised and the working principle
explained. Meanwhile, the mechanical structure of handling system is
designed on the basis of the non-contact vacuum cup. Finally, after
analyzing action steps of the handling process, the system is programed
with PLC to enable it to achieve the handling function.
Keywords Chip Processing Vacuum System design PLC programming
目次