二维粗糙度测量系统设计+CAD图纸
2 Dimensional roughness measurement system design
Abstract： This thesis is to design a two-dimensional roughness measuring instrument through optical electromechanical integration. This instrument is mainly pided into four large parts, namely the X direction, Y direction, Z direction and the workbench. X and Y directions using the conventional stepping motor, coupling, ball screw, nut seat, bearings, bearing housings joined together to form a mechanical transmission structure. Besides, displacement sensor is installed in the nut seat, the data is transmitted to the PC to control the stepper motor driver,which forms a closed loop system to adjust the displacement accuracy. Through three linear piezoelectric motor’s stretching to fine-tune the angle of the table.In the Z direction, the design of the adapter plate is to unite the linear multi-block guide, piezoelectric motor, CCD, optical interferometer of the lens together. Optical section is according to the optical interference theory, coupled with the different optical path formed retardation value thus obtained by the gradation value of the roughness. This measuring system is designed to measure the accuracy of the parts and the minimum the error.
KeyWords：Common path interferometer; Roughness; Resolution目录
1 绪论 1
1.1 目的要求 2
1.1.1课题的任务内容 2
1.1.2原始条件及数据 2
1.2课题的重点 2
1.3课程的难点 2
1.4发展现状 2
2 方案选择 4
2.1 光学测量 4
2.1.1 基于光学散射原理的测量技术 4
2.1.2 基于光学干涉原理的测量技术 4
2.1.3 光切法 5
2.1.4 散斑法 5
2.1.5 像散测定法 5
2.1.6 AFM 6
2.1.7 散射光角分布法 6
2.1.8 X射线漫散射法 7
2.2 方案的比较和确认 7
3 X方向部分设计 10
3.1 动力源 10
3.1.1 动力源的选择 10
3.1.2 计算选型 11
3.2 联轴器 13
3.2.1 联轴器选择 13
3.2.2 联轴器计算选型 14
3.3 滚珠丝杠 15
3.3.1 滚珠丝杠的选择 15
3.3.2 滚珠丝杠支撑方式的选择 18
3.3.3 滚珠丝杠计算 19
3.3.4 温度对滚珠丝杠的影响 20
3.4 轴承 20
3.4.1轴承的选择 20
3.4.2 轴承计算 21
3.5 直线导轨 21
3.5.1 直线导轨选择 21
3.5.2导轨计算 21