点衍射干涉仪出射波前仿真分析研究(2)
2. The problem of match the reference wavefront and the test wavefront in point diffraction interferometer was studied. The changes in light intensity were analysis comparatively with different hole diameter, defocus in lateral, the incident wavefront includeing aberrations. The simulation results showed that the smaller the hole diameter, the weaker the diffracted light intensity. For a given hole diameter, axial defocus in can adjust the contrast of interference pattern greatly, and lateral defocus can improve contrast to some extent. The transmission of point diffraction plate designed as 1/5 as the optimum transmission with no lateral defocus is reasonable. By using the property of the Fourier transform lens, a model was established with the point diffraction interferometer system regarded as 4f system, and the simulation results proved the defocusing effect on the contrast of the interference pattern.
3. The experiment measured the emission wavefront by the holes diffracting. A experimental wavefront diffracted by a 10um diameter pinhole detection system were constructed, and comparing the detection results with the simulation, both PV deviation is 0.025, and RMS deviation is 0.052. Construction of the point diffraction interferometer measurement system verified that adjusting defocus can obtain a better contrast interferogram for the plates with a given transmission, and the diffraction points of different diameter. The wavefront was recovered from the interferogram by Fourier transform method, and the results matched with the measurements by SID4 wave detectors, which verified the feasibility of a point diffraction interferometer.
Keywords: Point diffraction interferometer, Wavefront detection, The reference wavefront, Diffraction intensity, Scalar diffraction
目 次
1 绪论 1
1.1 研究背景及研究意义 1
1.2 国内外的研究现状及发展趋势 2
1.3 课题来源和主要研究内容 9
2 点衍射干涉仪系统与分析理论 11
2.1 技术指标 11
2.2 主体光路设计 11
2.3 点衍射相关分析理论 12
2.3.1 矢量衍射分析法 12
2.3.2 标量衍射分析法 13
3 点衍射干涉仪系统参考光波前分析 17
3.1 衍射参考光波前质量分析 17
3.1.1 小孔直径偏差 17
3.1.2 小孔圆度偏差 18
3.1.3 小孔粗糙度偏差 19
3.1.4 小孔横向对准偏差 20
3.1.5 入射波前像差 22
3.2 参考光光强分析 25
3.2.1 光强匹配 25
3.2.2 小孔直径影响 27
3.2.3 横向离焦影响 27
3.2.4 像差影响 29
3.2.5 膜层厚度 30
3.3 本章小结 31
4 点衍射干涉仪的干涉图分析 33
4.1 透镜的傅里叶变换性质 33
4.2 4f系统模型 34
4.3 干涉图仿真 35
4.4 本章小结 36
5 点衍射干涉仪的实验研究 37
5.1 点衍射板小孔与10um针孔参数检测研究 37
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