积分散射测量仪的测量原理及软件研究
关键词 积分散射 平面粗糙度 四文载物台
毕业论文设计说明书外文摘要
Title Research on the Measuring Principle and Software
of Integrating Scattering Measuring Instrument
Abstract
Since high precision optical components are applied in a large number of optical instruments, so the quality criteria of them are very strict. In this paper, the principle of the scattering measurement of the ultra-smooth surface is studied, and the study contents of it can be separated into three parts: four-dimensional carrier, data acquisition and testing software. Through the research on the movement theory of the four-dimensional loading machine and electric control system, we design reasonable movement program and function calls, in order to make the four-dimensional object loading table complete the motion measurement in the most cost-effective way. Through the research on the data acquisition method and data processing, we find the most suitable acquisition card and data processing program to complete the flow from data acquisition to data processing. Through the study of software testing, we design a functional complete and simple operation interface, making users easily to use. Finally, the research content of each part is integrated into a set of integrated scattering measuring instrument, the instrument can realize the automatic measurement of the ultra-smooth surface.
Keywords the integral scattering plane roughness four-dimensional stage
目 次
1 绪论 1
1.1 研究背景及意义 1
1.2 国内外现状 1
1.3 主要研究内容 4
2 超光滑表面散射测量系统的工作原理 5
2.1 积分散射测量仪的理论推导 5
2.2 积分散射测量仪的原理图 6
2.3 优化系统的构成 7
2.4 优化系统测量原理 15
2.5 本章小结 18
3 研究成果及分析 19
3.1 测量软件 19
3.2 四文载物台 21
3.3 采集结果 21
3.4 本章小结 24
结 论 25
致 谢 26
参考文献27
1 绪论
1.1 研究背景及意义
随着现代物理学的快速普及和惯性技术的迅速发展，惯性传感器也以惊人的速度在发展，在诸多惯性传感器中，尤其以具有独特优点的激光陀螺为主。但是，激光陀螺作为精密仪器的重要组件，在其生产过程中对它的表面光滑程度的要求必须非常注视，所以测量和评价它的粗糙度和缺陷显得尤为重要。 在光学元件的表面比如反射镜的检测中，光的散射特性已经被广泛应用并深入研究。由于激光陀螺会运用到表面十分精密的反射镜，其产生的散射光正是表面特性的一种表示方式。积分散射测量仪是以积分散射原理为基础的，所以它测量的是超光滑光学表面的积分散射分布，同时它也是是激光陀螺研制的重要课题之一[1]。
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