ZEMAX基于偏振移相的斐索型同步移相干涉测试技术的研究
关键词 干涉测量 同步移相 光栅分光 ZEMAX
Title Research on A Testing Technology of Fizeau Simultaneous
Phase-shifting Interference Based on Polarization Phase Shift
Abstract
With the development of the science and technology, optical elements and optical systems should
be required to be tested accurately in more and more occasions. This is the key to ensure the
processing quality of the and improve the accuracy of the optical systems. Therefore, the research
on the simultaneous phase-shifting interferometer system which is less affected by environmental
factors is of significance.
In this paper, a simultaneous PSI which based on Fizeau interferometer is designed. In this system,
the reference mirror is replaced by a quarter-wave plate. And then this beam of light can be pided
into four beams by two orthogonal phase Ronchi gratings. The phase of the lights are shifted by
the polarizer-array, in order to obtain four phase-shifted interference images.
The optical path diagram is given in this paper, Jones Matrix is used to analyze the principle and
the process of phase-shifting of this system. Then, the optical system is designed in ZEMAX, and
a variety of analysis functions are used to verify the rationality of design. Finally, the interference
image is simulated. Comparing the simulation result with the theoretical result, the 0.22% error of
the ZEMAX simulation can be calculated.
Keywords Interferometric measurement Simultaneous phase-shifting Grating splitting ZEMAX
目 次
1 绪论 · 1
1.1 课题背景 · 1
1.2 课题意义 · 1
1.3 国内外研究现状 1
1.4 本课题的主要工作 · 3
2 同步移相干涉的基本方法研究 4
2.1 基于棱镜分光的移相干涉方法 4
2.2 基于相位掩膜板的移相干涉方法 · 5
2.3 基于光栅分光的移相干涉方法 6
2.4 移相干涉系统结构 · 6
2.5 本章小结 · 7
3 同步移相干涉系统设计及原理 8
3.1 整体系统 · 8
3.2 分光系统 · 13
3.3 移相系统 · 15
3.4 本章小结 · 16
4 利用ZEMAX软件对本系统的仿真测试 17
4.1 整体光路设计 · 17
4.2 准直扩束系统光路设计 · 18