基于微细加工技术的微透镜阵列制备
毕业论文关键词：微细加工；微透镜阵列；X光光刻；PMMA；PDMS
Fabrication of micro lens array based on micro
fabrication technology
Abstract: With the rapid development of science and technology, the development of the instrument and equipment toward the direction of light, machine and electric power, micro electro mechanical system (MEMS) technology has become the mainstream technology of the advanced micro processing technology. The micro lens array fabricated by MEMS technology in micro optical technology has the advantages of small size, light weight, easy to integrate, and so on. This paper based on Liga (X-ray lithography, electroforming, molding) process of micro lens array of preparation principle, that is, through the two mobile X light exposure (after the first mobile X-ray lithography, the mask membrane plate to rotate by 90 DEG to the second mobile X-ray lithography), poly (methyl methacrylate) (PMMA) positive photoresist, on PMMA substrate making micro lens array. Design and fabrication of micro lens mask graphics, the simulation model is established, and the simulation of the first X light exposure of a single micro lens cross section shape. The PMMA micro lens array was prepared by two X lithography using synchrotron radiation light source. A low-cost PDMS micro lens array was fabricated from the PMMA mould by using poly two methyl silicone (PDMS) transfer molding process, and the morphology of the micro lens array was tested. Test results show that the duplicate PDMS micro lens has a smooth surface, with a diameter of about 300μm.
Keywords: Microfabrication；Micro lens array; X-ray lithography; PMMA; PDMS
目录
摘要 i
Abstract i
1 绪论 1
1.1 微透镜阵列研究背景 1
1.2 微透镜阵列研究现状和发展趋势 2
1.3 制备微透镜阵列的MEMS技术简介 3
1.4 研究目的及意义 4
2 微透镜阵列制备原理 6
2.1 微透镜阵列的制备原理 6
2.2 微透镜阵列的材料选择 8
3 微透镜阵列成形仿真与制备 10
3.1 微透镜阵列的仿真设计 10
3.2 利用LIGA方法制备PMMA微透镜阵列 21
3.3 利用原始模具进行PDMS转模 24
4 微透镜阵列的形貌测试 26
5 结论 30
致谢 32
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