各类光学薄膜厚度测量仪测量误差差异性研究
本论文对这些方法的测量误差进行研究，通过镀膜机用四种不同材料（二氧化锆ZrO2、二氧化钛TiO2、二氧化硅SiO2、氟化镁MgF2）在玻璃基片上镀制薄、中、厚三种不同厚度的膜层，然后通过分光光度计、椭偏仪、白光干涉仪和轮廓仪测量这些薄膜的厚度，对这些数据进行分析，得到仪器测量误差的差异性规律。8991
关键词： 光学薄膜 膜厚 膜厚测量仪 差异性
毕业设计说明书（论文）外文摘要
Title Law of inconsistency of measurement instruments for testing the thickness of optical thin film
Abstract
Thickness is the determinants to determine the ability of optical thin film to modulate luminosity or spectrum of the beam. The precise control of the thickness is the key to control the quality of optical thin films. There are some main methods to measure the thickness of optical thin film accurately, such as crystal method, white light interferometry, spectrophotometry, ellipsometry. There are some differences with measurement error of these methods. If we can master the inconsistency of the measurement error of these methods, reliable thickness data can be provided to coating engineers to produce optical thin film with high quality.
We do some study on the measurement error of these methods, and deposited the film with different thickness on glass substrates with four different materials concluding ZrO2, SiO2, MgF2 and TiO2. Then, we measure the thickness of these films with spectrophotometer, ellipsometer, white light interferometer and profilometer. Lastly, we analyze the data to gain the law of inconsistency of measurement instruments for testing the thickness.
Keywords: optical thin film, film thickness, film thickness gauge, inconsistency
目 次
1 引言 1
1.1 课题的背景和意义 1
1.2 国内外研究状况 1
1.3 本论文研究的主要工作 2
2 薄膜镀制的厚度控制 3
2.1 真空镀膜机的镀膜原理 3
2.2 薄膜厚度监控技术 5
2.3 薄膜光谱特性的数学模型 8
3 不同厚度薄膜样品的镀制和测量 10
3.1 不同厚度薄膜样品的镀制 10
3.2 不同厚度的薄膜样品的测量实验 13
4 数据分析 40
4.1 仪器测量结果整理 40
4.2 数据分析 42
总结 45
致谢 46
参考文献 47
1 引言
1.1 课题的背景和意义
近几十年来，薄膜技术发展迅猛，从理论计算、设计测量到工艺各方面均已形成了完整的体系，应用范围也涵盖了工业、农业、建筑、交通运输、医学、天文学、军事以及宇航等领域[1-2]。时至今日，可以毫不夸张的说，几乎所有的光学系统、光电系统或光电仪器都离不开光学薄膜的应用。只要有运用到光学元件之处，都可以利用光学薄膜改善它的品质和技术，使产品变得更完善。如果没有光学薄膜技术作为发展基础，近代光电、通讯或是激光技术，将无法有所进展。光学薄膜在光通讯、光学测量等技术领域的作用尤其重要，它具有改变介质的光学特性(如增透膜，高反膜等)，优化物质表面性能，进行微细加工，产生新的功能特性等优点[3]。