非球面检验用二元光学器件参数特性研究
关键词： CGH， 线性光栅， 波前敏感函数， 光刻毕业设计说明书（论文）外文摘要
Title Specification and characterization of CGHs for aspheric null testing
Abstract
Using computer-generated holograms (CGHs) as compensation element to test aspheric surface and free-form surface is the hot topic in optical metrology field, which can obtain high precision and realize large aspheric testing. However, the test result will be strongly influenced by the fabrication errors, such as etching depth errors, duty-cycle errors and so on. This paper analyzes the binary, linear grating model of CGH based on the scalar diffraction theory. In the Simulation section, the phase and efficiency change is figured out accounting to the change of CGH parameters. The CGH errors are classified and the wavefront sensitivity function is deduced. Meanwhile, the modeling of rough surface bottom of the grating is presented and the discrete Fourier transform is applied to simulate the far-field diffraction, to verify the correction of simplifying surface roughness for the amplitude attenuation. Furthermore, the Vecoo NT9100 is used to determine the sample CGH parameters, and compare the differences of manufacturing level between domestic and foreign.
Keywords computer-generated holograms, linear grating, wavefront sensitivity function, lithography
目次
1 绪论 1
1.1 计算全息（CGH）研究发展 1
1.2 本论文主要内容及工作 3
2 二元线性光栅模型 4
2.1 CGH发展与分类 4
2.2 二元线性光栅模型 4
2.3 衍射场的图形表示 7
3 CGH微观形貌参数与衍射场复振幅关系 8
3.1 CGH参数对衍射效率的影响 8
3.2 CGH参数对波前相位的影响 11
4 CGH的误差分类及分析 14
4.1 CGH误差分类 14
4.2 基底面型误差对波前的影响及消除方法 14
4.3 局部图形畸变对波前的影响及消除方法 15
4.4 简化粗糙度对波前的影响 15
4.5 波前敏感函数 16
5 粗糙面建模 21
5.1 粗糙度建模 21
5.2 光栅形貌建模 23
5.3 等效模型建模 24
6 粗糙度对衍射场影响的分析 26
6.1 单粗糙度的出射波傅里叶变换 26
6.2 多种粗糙度的出射波傅里叶变换 26
7 CGH微观轮廓测试 29
7.1 白光干涉表面轮廓仪测量原理 29
7.2 VEECO轮廓仪系统 29
7.3 测量结果及分析 30