摘要陀螺也称为角速率传感器，是用来测量物体旋转快慢的传感器。微机械陀螺尺寸小、成本低、功耗小，适合微型系统和低成本的应用。目前，多轴陀螺越来越广泛地应用于导航和消费电子领域。依据仿生学原理的蝶形硅微陀螺具有设计精巧、性能较好的优点。42455

   本课题在理论分析、工艺研究的基础上，设计蝶形陀螺的结构，给出具体的陀螺参数（包括结构参数和电学参数，并仿真分析力学行为，给出性能预估值。仿真过程包括建立模型，采用ANSYS软件来进行静力学分析，研究自然状态下的位移和极限位移状态下蝶形陀螺的应力状态；对蝶形陀螺进行模态匹配，使得其驱动模态和检测模态匹配起来；最后进行瞬态动力学分析，得到陀螺在不同状态下的动态响应。

本文以蝶形微机械陀螺为研究对象，设计出蝶形陀螺的最终结构。通过此过程，为MEMS传感器的设计提供了借鉴意义，为设计具有高精度、高灵敏度的新型陀螺提供了有效、正确的方法。

关键词：蝶形微机械陀螺 结构设计 有限元分析 模态仿真  

毕业论文设计说明书外文摘要

Title   The  Design of Structure For the Butterfly Gyro 

Abstract

Also known as the gyro angular rate sensor is used to measure the rotation speed of the object sensor. Gyroscope small size, low cost, low power consumption, and low-cost system for micro applications. At present, more and more widely used in multi-axis gyro navigation and consumer electronics. Based on the principle of bionics butterfly Microgyroscope have sophisticated design, good performance advantages.

This subject of theoretical analysis, basic technology research, design butterfly structure gyro, gyro give specific parameters (including the structural parameters and electrical parameters, simulation and analysis of mechanical behavior, performance estimates given simulation process including the establishment of model using ANSYS software to perform static analysis, research butterfly gyro displacement and stress state of ultimate displacement state natural state; for gyro modal matching butterfly, makes its driving mode and test mode to match up; Finally, transient dynamics analysis, dynamic response of the gyro in different states.

In this paper butterfly gyroscope for the study, design butterfly final structure gyroscope. Through this process, for the design of MEMS sensor provides a reference for the design of high accuracy, high sensitivity of the new gyroscope to provide an effective and correct way.

Keywords:  Butterfly gyroscope  Structure design  Finite element analysis  Modal  simulation     

目   次

1  绪论 1

1.1  微机电系统的发展情况 1

1.2  微机械陀螺的发展情况 1

1.3  微机械陀螺的设计与仿真 1

1.4 本文的主要内容 2

2 微机械陀螺的工作原理和误差分析 3

2.1 微机械陀螺的工作原理 3

2.2蝶形微机械陀螺的运行原理 4

2.4 本章小结 5

3 蝶形微机械陀螺的结构设计 7

3.1蝶形微机械陀螺的几何模型和实体模型 7

3.2蝶形微机械陀螺结构尺寸的设计思路 8

3.3本章小结 9